Auto-doping of carbon to AlAs grown by metalorganic chemical vapor deposition using trimethylaluminum and tertiarybutylarsine

被引：0

作者：

Sekiguchi, Shigeaki ^{[1
]}

Miyamoto, Tomoyuki ^{[1
]}

Koyama, Fumio ^{[1
]}

Iga, Kenichi ^{[1
]}

机构：

[1] Tokyo Inst of Technology, Yokohama, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1997年 / 36卷 / 5 A期

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摘要：

引用

页码：2638 / 2639

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[1] Auto-doping of carbon to AlAs grown by metalorganic chemical vapor deposition using trimethylaluminum and tertiarybutylarsine
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