Molecular simulation of film growth rate in the low-pressure CVD method. (Two-dimensional horizontal reactor)

被引：0
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作者：
Nanbu, Kenichi
Igarashi, Saburo
Watanabe, Yasuo
机构：
来源：
Nippon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B | 1990年 / 56卷 / 524期
关键词：
Test-Particle Monte Carlo Method;
D O I：
10.1299/kikaib.56.892
中图分类号：
学科分类号：
摘要：
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页码：892 / 897
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