PHOTORESIST TECHNOLOGY AND PROCESSING TECHNIQUES FOR FINE DIMENSIONAL CONTROL.

被引：0
|
作者：
Clark, Kenneth G.
机构：
来源：
| 1600年 / 21期
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
INTEGRATED CIRCUIT MANUFACTURE
引用
收藏
相关论文
共 50 条
  • [41] REVIEW OF OIL AGGLOMERATION TECHNIQUES FOR PROCESSING OF FINE COALS
    MEHROTRA, VP
    SASTRY, KVS
    MOREY, BW
    INTERNATIONAL JOURNAL OF MINERAL PROCESSING, 1983, 11 (03) : 175 - 201
  • [42] TECHNOLOGY PROCESSING TECHNIQUES AND DESIGN OF PROCESSING MACHINES - INTERRELATIONS AND TASKS
    HERRNSDO.H
    MASCHINENBAU TECHNIK, 1968, 17 (07): : 338 - &
  • [43] FINE PARTICLE CONTROL TECHNOLOGY - REPLY
    DREHMEL, DC
    HARMON, DL
    SPARKS, LE
    JOURNAL OF THE AIR POLLUTION CONTROL ASSOCIATION, 1977, 27 (05): : 473 - &
  • [44] Fundamentals of Operations in Plastics Processing Plants as a Result of the Investigation of Process Control.
    Menges, G.
    Plastverarbeiter, 1974, 25 (05): : 265 - 274
  • [45] FINE MINERAL FILLERS - THEIR APPLICATIONS AND RELATED PROCESSING TECHNOLOGY
    KRIENS, J
    CIM BULLETIN, 1983, 76 (851): : 82 - 82
  • [46] Contamination control. An indispensable factor in high-technology manufacturing tasks
    Schicht, Hans H.
    Journal of Aerosol Science, 1990, 21 (Supp 1) : 719 - 732
  • [47] Nano-TiO2 photocatalytic technology and atmospheric pollution control.
    纳米二氧化钛光催化技术与大气污染治理
    2018, Chinese Society for Environmental Sciences (38):
  • [48] Three dimensional silicon integration using fine pitch interconnection, silicon processing and silicon carrier packaging technology
    Knickerbocker, JU
    Patel, CS
    Andry, PS
    Tsang, CK
    Buchwalter, LP
    Sprogis, E
    Gan, H
    Horton, RR
    Polastre, R
    Wright, SL
    Schuster, C
    Baks, C
    Doany, F
    Rosner, J
    Cordes, S
    CICC: PROCEEDINGS OF THE IEEE 2005 CUSTOM INTEGRATED CIRCUITS CONFERENCE, 2005, : 659 - 662
  • [49] Spatially-programmable temperature control and measurement for chemically amplified photoresist processing
    Schaper, CD
    El-Awady, K
    Tay, A
    PROCESS, EQUIPMENT, AND MATERIALS CONTROL IN INTEGRATED CIRCUIT MANUFACTURING V, 1999, 3882 : 74 - 79
  • [50] Three-dimensional trajectory tracking of a quadrotor through PVA control.
    Martinez, Silvia Estelles
    Tomas-Rodriguez, Maria
    REVISTA IBEROAMERICANA DE AUTOMATICA E INFORMATICA INDUSTRIAL, 2014, 11 (01): : 54 - 67
12345