PHOTORESIST TECHNOLOGY AND PROCESSING TECHNIQUES FOR FINE DIMENSIONAL CONTROL.

被引：0
|
作者：
Clark, Kenneth G.
机构：
来源：
| 1600年 / 21期
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
INTEGRATED CIRCUIT MANUFACTURE
引用
收藏
相关论文
共 50 条
  • [1] PHOTORESIST TECHNOLOGY AND PROCESSING TECHNIQUES FOR FINE DIMENSIONAL CONTROL
    CLARK, KG
    SOLID STATE TECHNOLOGY, 1978, 21 (08) : 73 - 79
  • [2] Control and signal processing for photoresist processing in microlithography
    Tay, A
    Ho, WK
    Lim, KW
    Loh, AP
    Tan, WW
    IECON-2002: PROCEEDINGS OF THE 2002 28TH ANNUAL CONFERENCE OF THE IEEE INDUSTRIAL ELECTRONICS SOCIETY, VOLS 1-4, 2002, : 1468 - 1473
  • [3] TECHNIQUES FOR INDUSTRIAL ODOR CONTROL.
    Cheremisinoff, Paul N.
    Bethea, Robert M.
    Hellman, Thomas M.
    Pollution Engineering, 1975, 7 (10): : 24 - 31
  • [4] Monitoring and control of photoresist properties and CD during photoresist processing
    Yang, Geng
    Ngo, Yit-Sung
    Putra, Andi S.
    Ang, Kar-Tien
    Tay, Arthur
    Fang, Zhong-Ping
    METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXIV, 2010, 7638
  • [5] Instrumentation in Plastics Processing Control.
    Recker, H.
    Berndtsen, N.
    Sarholz, R.
    Dormeier, S.
    Hegesbach, H.A.
    Hellmeyer, H.O.
    Hensel, H.
    Plastverarbeiter, 1977, 28 (01): : 1 - 8
  • [6] PHOTOGRAPHIC PROCESSING EFFLUENT CONTROL.
    Dagon, Thomas J.
    1978, 4 (02): : 62 - 71
  • [7] ADVANCED TECHNOLOGY FOR ROOF CONTROL.
    Zona, Anthony
    Hoch, M.Terry
    Debevec, William J.
    Proceedings of the Society of Photo-Optical Instrumentation Engineers, 1980,
  • [8] APPLICATION OF MODERN CONTROL TECHNIQUES TO MOTOR CONTROL.
    Dote, Yasuhiko
    1600, (76):
  • [9] TECHNIQUES OF STAGE AND STUDIO LIGHTING CONTROL.
    Irving, D.C.
    Proceedings of the IREE Australia (Institution of Radio and Electronics Engineers), 1975, 36 (11): : 359 - 364
  • [10] INDUSTRIAL SAND PROCESSING AND QUALITY CONTROL.
    Lavender, M.D.
    Glass international, 1986, : 49 - 50
12345