PHOTOELASTIC/TOPOGRAPHIC ANALYZER.

被引：0
|
作者：
Anon
机构：
来源：
IBM technical disclosure bulletin | 1985年 / 27卷 / 11期
关键词：
OPTICAL INSTRUMENTS - Applications;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The Photoelastic/Topographic Analyzer (PTA) allows screening of wafers for internal stresses prior to further processing. The analyzer simultaneously performs two functions: it examines the wafer surface topography by means of a 2-beam interferometer, and it detects stresses within the wafer by viewing it in the near infrared between crossed polarizers. By this technique, bad wafers can be discarded before undergoing extensive processing. The tester is comprised of the following three optical systems: Michelson interferometer, IR illumination system and IR imaging system.
引用
收藏
页码：6765 / 6766
相关论文
共 50 条
  • [41] Development of a total beryllium field analyzer.
    Ekechukwu, AA
    McWhorter, S
    Cable-Dunlap, P
    DeGange, J
    Shick, CR
    Coleman, CJ
    Jurgensen, AR
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2004, 227 : U96 - U96
  • [42] DATA PROCESSOR INTERFACE TO MULTICHANNEL ANALYZER.
    Joshi, J.N.
    Govil, Rekha
    Kataria, S.K.
    Indian Journal of Pure and Applied Physics, 1983, 21 (06): : 379 - 380
  • [43] Measurement of adenosine deaminase on the Ektachem analyzer.
    Machado, HN
    Schenkel, OJ
    Berlitz, FA
    Wong, SS
    CLINICAL CHEMISTRY, 1997, 43 : 82 - 82
  • [44] A multicenter evaluation of the Clot Signature Analyzer.
    Fricke, W
    Kouides, P
    Kessler, C
    Schmaier, A
    Joist, JH
    Krijanovski, Y
    BLOOD, 2002, 100 (11) : 697A - 697A
  • [45] ABERRATION ANALYSIS OF A CROSSED-FIELD ANALYZER.
    Tang, Tian-Tong
    Optik (Jena), 1986, 74 (02): : 51 - 56
  • [46] A Sequence Generator as a Help to the Uses of a Logic Analyzer.
    Anon
    Electronique industrielle, 1982, (33): : 47 - 52
  • [47] Evaluation of a rapid, automated blood volume analyzer.
    Sarkar, SD
    Palestro, CJ
    Bhargava, KK
    JOURNAL OF NUCLEAR MEDICINE, 1999, 40 (05) : 215P - 215P
  • [48] ACCURACY PREDICTIONS FOR A NEW GENERATION NETWORK ANALYZER.
    Donecker, Bruce
    Microwave journal, 1984, 27 (06): : 127 - 141
  • [49] Statical Characteristics of Vibrational Slot Image Analyzer.
    Soldatov, V.P.
    Izvestia vyssih ucebnyh zavedenij. Priborostroenie, 1980, 23 (11): : 61 - 64
  • [50] DESIGN FACTORS IN A FULLY AUTOMATED DISTORTION ANALYZER.
    Hood, Rush
    Audio Engineering Society Preprint, 1980,
12345