PHOTOELASTIC/TOPOGRAPHIC ANALYZER.

被引：0
|
作者：
Anon
机构：
来源：
IBM technical disclosure bulletin | 1985年 / 27卷 / 11期
关键词：
OPTICAL INSTRUMENTS - Applications;
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学科分类号：
摘要：
The Photoelastic/Topographic Analyzer (PTA) allows screening of wafers for internal stresses prior to further processing. The analyzer simultaneously performs two functions: it examines the wafer surface topography by means of a 2-beam interferometer, and it detects stresses within the wafer by viewing it in the near infrared between crossed polarizers. By this technique, bad wafers can be discarded before undergoing extensive processing. The tester is comprised of the following three optical systems: Michelson interferometer, IR illumination system and IR imaging system.
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页码：6765 / 6766
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