PHOTOELASTIC/TOPOGRAPHIC ANALYZER.

被引：0
|
作者：
Anon
机构：
来源：
IBM technical disclosure bulletin | 1985年 / 27卷 / 11期
关键词：
OPTICAL INSTRUMENTS - Applications;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The Photoelastic/Topographic Analyzer (PTA) allows screening of wafers for internal stresses prior to further processing. The analyzer simultaneously performs two functions: it examines the wafer surface topography by means of a 2-beam interferometer, and it detects stresses within the wafer by viewing it in the near infrared between crossed polarizers. By this technique, bad wafers can be discarded before undergoing extensive processing. The tester is comprised of the following three optical systems: Michelson interferometer, IR illumination system and IR imaging system.
引用
收藏
页码：6765 / 6766
相关论文
共 50 条
  • [1] IMAGE ANALYZER.
    Belago, I.V.
    Starkov, M.A.
    Optoelectronics, Instrumentation and Data Processing (English translation of Avtometriya), 1984, (06): : 49 - 53
  • [2] PROTOCOL ANALYZER.
    Matsushita Communication Industrial, Co, Jpn, Matsushita Communication Industrial Co, Jpn
    Natl Tech Rep Matsushita Electr Ind Co, 1987, 4 (488-496):
  • [3] STEEL BEAM ANALYZER.
    Malasri, Siripong
    Structural engineering practice, analysis, design, management, 1986, 3 (3-4): : 179 - 189
  • [4] A mechanical synthesizer and analyzer.
    Kranz, FW
    JOURNAL OF THE FRANKLIN INSTITUTE, 1927, 204 : 245 - 262
  • [5] Realization of a Protocol Analyzer.
    Helfenbein, Henrik
    Kohegyi, Janos
    Sandor, Antal
    Szlavi, Peter
    Zsako, Laszlo
    Meres es automatika, 1983, 31 (06): : 227 - 231
  • [6] SIMPLIFIED EQUALIZATION ANALYZER.
    Bevan, William R.
    AES: Journal of the Audio Engineering Society, 1978, 26 (03): : 120 - 129
  • [7] STATISTICAL PULSE ANALYZER.
    Petrov, B.I.
    Instruments and experimental techniques New York, 1986, 29 (5 pt 1): : 1066 - 1068
  • [8] PHONON SPECTRUM ANALYZER.
    Rajeevakumar, T.V.
    IBM technical disclosure bulletin, 1983, 25 (10): : 5083 - 5084
  • [9] Digital Differential Analyzer.
    Dobias, Karel
    Wollner, Petr
    Zipek, Jiri
    Automatizace Praha, 1983, 26 (04): : 102 - 106
  • [10] INEXPENSIVE NETWORK ANALYZER.
    Ladbrooke, P.H.
    Huey, R.M.
    IEEE Transactions on Education, 1978, E-21 (02) : 71 - 74
12345