GAS INJECTOR FOR NITRIDE DEPOSITION USING 2% SILANE GAS.

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作者：
Gallagher, J.P.
Li, P.C.
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来源：
IBM technical disclosure bulletin | 1983年 / 26卷 / 7 B期
关键词：
GAS INJECTORS;
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页码：3577 / 3578
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