DEPOSITION OF ALUMINUM NITRIDE FROM THE GAS-PHASE

被引：0
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作者：
FUNKE, VF
KOSUKHIN, VV
KLEMENTEV, AA
OLEINIKOV, PP
LYAKOV, DM
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来源：
INORGANIC MATERIALS | 1984年 / 20卷 / 01期
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中图分类号：
T [工业技术];
学科分类号：
08 ;
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页码：57 / 60
页数：4
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