'IN-SITU SCRIBING ANALYSIS' OF SOLID SURFACES FOR QUANTITATIVE AUGER ELECTRON SPECTROSCOPY.

被引：0
|
作者：
Mogami, A. [1 ]
Uemura, M. [1 ]
Okitsu, A. [1 ]
Takahashi, N. [1 ]
机构：
[1] JEOL Ltd, Tokyo, Jpn, JEOL Ltd, Tokyo, Jpn
来源：
Scanning Electron Microscopy | 1984年 / pt 4期
关键词：
COPPER AND ALLOYS - SURFACES - Analysis;
D O I：
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中图分类号：
学科分类号：
摘要：
Quantiative AES is most easily accomplished by a calibration using standards with known surface compositions. In-situ scribing with a diamond tip was found to be one of the most convenient methods for producing a surface with a composition equal to that of the bulk. The experiment was performed in a JEOL scanning Auger electron microprobe, JAMP-10S provided with a scribing tool, and Auger analysis was carried out using a primary electron beam of 10 kev - 0. 1 mu A. This method has been compared with other procedures; sputter-deposition and co-evaporation. The material used was some binary alloys in solid solution such as 65Ni-35Cu, 50Ni-50Cu and 70Cu-30Zn in atomic percents.
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页码：1675 / 1679
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