'IN-SITU SCRIBING ANALYSIS' OF SOLID SURFACES FOR QUANTITATIVE AUGER ELECTRON SPECTROSCOPY.

被引：0

作者：

Mogami, A. ^{[1
]}

Uemura, M. ^{[1
]}

Okitsu, A. ^{[1
]}

Takahashi, N. ^{[1
]}

机构：

[1] JEOL Ltd, Tokyo, Jpn, JEOL Ltd, Tokyo, Jpn

来源：

Scanning Electron Microscopy | 1984年 / pt 4期

关键词：

COPPER AND ALLOYS - SURFACES - Analysis;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Quantiative AES is most easily accomplished by a calibration using standards with known surface compositions. In-situ scribing with a diamond tip was found to be one of the most convenient methods for producing a surface with a composition equal to that of the bulk. The experiment was performed in a JEOL scanning Auger electron microprobe, JAMP-10S provided with a scribing tool, and Auger analysis was carried out using a primary electron beam of 10 kev - 0. 1 mu A. This method has been compared with other procedures; sputter-deposition and co-evaporation. The material used was some binary alloys in solid solution such as 65Ni-35Cu, 50Ni-50Cu and 70Cu-30Zn in atomic percents.

引用

页码：1675 / 1679

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