Potential of reactively RF sputtered ZnO thin films for the fabrication of microwave filters

被引：0
|
作者：
Kollias, A.T. [1 ]
Tsamis, E.D. [1 ]
Avaritsiotis, J.N. [1 ]
机构：
[1] Dept. of Elec. and Comp. Engineering, Natl. Technical University of Athens, 9, Iroon Polytechniou St. Zografou, Athens, 15773, Greece
来源：
Active and Passive Electronic Components | 2000年 / 23卷 / 02期
关键词：
Crystal filters - Crystal orientation - Crystal resonators - Microwave filters - Optimization - Piezoelectricity - Scanning electron microscopy - Semiconducting glass - Semiconducting silicon - Sputter deposition - X ray diffraction analysis - Zinc oxide;
D O I：
10.1155/APEC.23.75
中图分类号：
学科分类号：
摘要：
The piezoelectric properties of reactively sputtered ZnO thin films deposited on glass and silicon substrates were studied in order to assess their potential for the construction of RF overmoded filters. Films of high crystallographic orientation {002}, as shown by XRD measurements and SEM observations, and high value of keff2, calculated with the aid of the BVD model, were obtained after the optimization of the deposition conditions, with highly repetitive properties. Simple devices were designed and constructed on silicon substrates which showed a quality factor of 1000 without the use of a Bragg acoustic reflector, and a temperature drift of -30 ppm/°C.
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页码：75 / 95
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