Application of ion-beam-sputtered Al films to ultrathin surface acoustic wave devices

被引：0

作者：

Kamijo, Atsushi ^{[1
]}

Mitsuzuka, Tsutomu ^{[1
]}

Yamamoto, Yasushi ^{[1
]}

Tomotsune, Kaoru ^{[1
]}

Tamichi, Shigeru ^{[1
]}

机构：

[1] NEC Corp, Kanagawa, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1993年 / 32卷 / 5 B期

关键词：

Acoustic surface wave devices;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：2346 / 2350

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