Characteristics of AlN thin films deposited by electron cyclotron resonance dual-ion-beam sputtering and their application to GHz-band surface acoustic wave devices

被引：0
|
作者：
Okano, Hiroshi [1 ]
Tanaka, Naoki [1 ]
Hirao, Yasuhiro [1 ]
Kobayashi, Yasumi [1 ]
Shibata, Kenichi [1 ]
Nakano, Shoichi [1 ]
机构：
[1] SANYO Electric Co, Ltd, Osaka, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1994年 / 33卷 / 5 B期
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16;
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页码：2957 / 2961
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