Fabrication of two-dimensional photonic crystal waveguides for 1.5 μm in silicon by deep anisotropic dry etching

被引：0
|
作者：
Zijlstra, T.
Van, Der Drift, E.
De, Dood, M.J.A.
Snoeks, E.
Polman, A.
机构：
来源：
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | / 17卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
21
引用
收藏
页码：2734 / 2739
相关论文
共 50 条
  • [41] Fabrication of a Two-Dimensional Photonic Crystals Using Reactive Ion Etching
    Zhou, Jingtao
    Shen, Huajun
    Zhang, Huihui
    Liu, Xinyu
    2008 11TH IEEE SINGAPORE INTERNATIONAL CONFERENCE ON COMMUNICATION SYSTEMS (ICCS), VOLS 1-3, 2008, : 1231 - 1234
  • [42] Fabrication and optical property of two-dimensional infrared photonic crystals by deep reactive ion etching in Si
    Zhou, M
    Chen, XS
    Zeng, Y
    Xu, J
    Wang, SW
    Lu, W
    CONFERENCE DIGEST OF THE 2004 JOINT 29TH INTERNATIONAL CONFERENCE ON INFRARED AND MILLIMETER WAVES AND 12TH INTERNATIONAL CONFERENCE ON TERAHERTZ ELECTRONICS, 2004, : 183 - 184
  • [43] Fabrication of multilevel silicon structures by anisotropic deep silicon etching
    Huber, R
    Conrad, J
    Schmitt, L
    Hecker, K
    Scheurer, J
    Weber, M
    MICROELECTRONIC ENGINEERING, 2003, 67-8 : 410 - 416
  • [44] Photonic band gap in two-dimensional anisotropic photonic crystal with rectangular bars
    Wang, SW
    Lu, W
    Chen, XS
    Zhou, M
    Shen, XC
    INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES, 2003, 24 (06): : 963 - 971
  • [45] Photonic Band Gap in Two-Dimensional Anisotropic Photonic Crystal with Rectangular Bars
    Shao-Wei Wang
    Wei Lu
    Xiao-Shuang Chen
    Mei Zhou
    Xue-Chu Shen
    International Journal of Infrared and Millimeter Waves, 2003, 24 : 963 - 971
  • [46] Fabrication of silicon-based two-dimensional photonic crystals
    Zhu, Jian
    Zhang, Yong
    Zhou, Bailing
    Gao, Jianfeng
    Jia, Shixing
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2006, 12 (10-11): : 919 - 922
  • [47] CRYSTALLINE ANISOTROPIC DRY ETCHING FOR SINGLE CRYSTAL SILICON
    Mishima, T.
    Terao, K.
    Takao, H.
    Shimokawa, F.
    Oohira, F.
    Suzuki, T.
    2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2011, : 221 - 224
  • [48] Fabrication of silicon-based two-dimensional photonic crystals
    Jian Zhu
    Yong Zhang
    Bailing Zhou
    Jianfeng Gao
    Shixing Jia
    Microsystem Technologies, 2006, 12 : 919 - 922
  • [49] A two-dimensional photonic crystal slab mirror with silicon on insulator for wavelength 1.3 μm
    Tang Hai-Xiao
    Zuo Yu-Hua
    Yu Jin-Zhong
    Wang Qi-Ming
    CHINESE PHYSICS LETTERS, 2006, 23 (10) : 2790 - 2792
  • [50] Modeling and characterization of tunable photonic crystal waveguides based on two-dimensional periodic arrays of silicon pillars
    Butt, Haider
    Dai, Qing
    Wilkinson, Timothy D.
    Amaratunga, Gehan A. J.
    HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS IV, 2010, 7848
12345