Fabrication of two-dimensional photonic crystal waveguides for 1.5 μm in silicon by deep anisotropic dry etching

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作者：
Zijlstra, T.
Van, Der Drift, E.
De, Dood, M.J.A.
Snoeks, E.
Polman, A.
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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | / 17卷
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21
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页码：2734 / 2739
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