Characterisation of complex multilayer structures using spectroscopic ellipsometry

被引：0
|
作者：
Alonso, M.I. [1 ]
Garriga, M. [1 ]
Dománguez, C. [2 ]
Llobera, A. [2 ]
机构：
[1] Inst. de Cie. de Mat. de Barcelona, Consejo Sup. de Invest. Cientificas, Campus de la UAB, 08193 Bellaterra, Spain
[2] Inst. Microelectronica de Barcelona, Consejo Sup. de Invest. Cientificas, Campus de la UAB, 08193 Bellaterra, Spain
来源：
Journal De Physique. IV : JP | 1999年 / 9 pt 2卷 / 08期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：8 / 1195
相关论文
共 50 条
  • [41] Investigation of multilayer samples of porous silicon with periodic structure by spectroscopic ellipsometry
    Veremeichyk, T. V.
    Makarenko, O. V.
    Shevchenko, V. B.
    Ivanchuk, S. Y.
    Rybalochka, A. V.
    LOW TEMPERATURE PHYSICS, 2025, 51 (02) : 239 - 243
  • [42] Characterization of different porous silicon structures by spectroscopic ellipsometry
    Fried, M
    Lohner, T
    Polgar, O
    Petrik, P
    Vazsonyi, E
    Barsony, I
    Piel, JP
    Stehle, JL
    THIN SOLID FILMS, 1996, 276 (1-2) : 223 - 227
  • [43] SPECTROSCOPIC ELLIPSOMETRY FOR CHARACTERIZATION OF THIN-FILM STRUCTURES
    KASPARICK, B
    STEHLE, JL
    BERNOUX, F
    THOMAS, O
    TECHNISCHES MESSEN, 1989, 56 (04): : 149 - 153
  • [44] Characterisation of Cd1-xMgxSe solid solutions by spectroscopic ellipsometry
    Wronkowska, AA
    Wronkowski, A
    Arwin, H
    Firszt, F
    Legowski, S
    Meczynska, H
    Szatkowski, J
    VACUUM, 2001, 63 (1-2) : 233 - 239
  • [45] Spectroscopic ellipsometry: Application to complex optoelectronic layer systems
    Rheinlander, B
    Schubert, M
    Schmidt, H
    HETEROSTRUCTURE EPITAXY AND DEVICES: HEAD '97, 1998, 48 : 151 - 154
  • [46] Combine spectroscopic ellipsometry and grazing x-ray reflectance for fine characterization of complex epitaxial structures
    Boher, P
    Stehle, JL
    DIAGNOSTIC TECHNIQUES FOR SEMICONDUCTOR MATERIALS PROCESSING II, 1996, 406 : 515 - 521
  • [47] Combine spectroscopic ellipsometry and grazing X-ray reflectance for fine characterization of complex epitaxial structures
    Boher, P
    Stehle, JL
    SURFACE/INTERFACE AND STRESS EFFECTS IN ELECTRONIC MATERIALS NANOSTRUCTURES, 1996, 405 : 399 - 405
  • [48] Unraveling metallic contaminants in complex polyimide heterostructures using deep ultraviolet spectroscopic ellipsometry
    Naradipa, Muhammad Avicenna
    Lianto, Prayudi
    See, Gilbert
    Sundarrajan, Arvind
    Rusydi, Andrivo
    APPLIED PHYSICS LETTERS, 2023, 123 (13)
  • [49] Spectroscopic ellipsometry measurement and simulation of mesoporous TiO2 multilayer films
    Huang, Lu
    Shen, Yue
    Gu, Feng
    Xu, Xudong
    Zhang, Jiancheng
    THIN FILM PHYSICS AND APPLICATIONS, SIXTH INTERNATIONAL CONFERENCE, 2008, 6984 : 98416 - 98416
  • [50] Spectroscopic ellipsometry on metal and metal-oxide multilayer hybrid plasmonic nanostructures
    Khosroabadi, Akram A.
    Gangopadhyay, Palash
    Cocilovo, Byron
    Makai, Laszlo
    Basa, Peter
    Duong, Binh
    Thomas, Jayan
    Norwood, Robert A.
    OPTICS LETTERS, 2013, 38 (19) : 3969 - 3972
12345