Characterisation of complex multilayer structures using spectroscopic ellipsometry

被引：0
|
作者：
Alonso, M.I. [1 ]
Garriga, M. [1 ]
Dománguez, C. [2 ]
Llobera, A. [2 ]
机构：
[1] Inst. de Cie. de Mat. de Barcelona, Consejo Sup. de Invest. Cientificas, Campus de la UAB, 08193 Bellaterra, Spain
[2] Inst. Microelectronica de Barcelona, Consejo Sup. de Invest. Cientificas, Campus de la UAB, 08193 Bellaterra, Spain
来源：
Journal De Physique. IV : JP | 1999年 / 9 pt 2卷 / 08期
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页码：8 / 1195
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