Kinetic study of Al distribution coefficient in MOVPE growth of AlGaAs

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作者：
Gong, Yanning
Mo, Jinji
Yu, Haisheng
Xia, Guanqun
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来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2000年 / 21卷 / 02期
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摘要：
11
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页码：137 / 141
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