Effect of laser-induced dissociation during measurements of hydrogen atoms in silane plasmas using two-photon-excited laser-induced fluorescence

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机构：
[1] Park, Won Zoo
[2] Tanigawa, Manabu
[3] Kajiwara, Toshinori
[4] Muraoka, Katsunori
[5] Masuda, Mitsuharu
[6] Okada, Tatsuo
[7] Maeda, Mitsuo
[8] Suzuki, Atsushi
[9] Matsuda, Akihisa
来源：
Park, Won Zoo | 1600年 / 31期
关键词：
Hydrogen atom density distribution - Laser induced dissociation - Lyman beta transition - Silane plasmas - Two photon excitation;
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摘要：
During measurements of atomic hydrogen in a silane plasma using two-photon-excited laser-induced fluorescence, laser-induced dissociation of the gas was observed. This was investigated until conditions for the input laser fluence were determined where the effect was negligible. A measurement of the atomic hydrogen distribution was then performed within the limits of these conditions.
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