EFFECT OF LASER-INDUCED DISSOCIATION DURING MEASUREMENTS OF HYDROGEN-ATOMS IN SILANE PLASMAS USING 2-PHOTON-EXCITED LASER-INDUCED FLUORESCENCE

被引：8
|
作者：
PARK, WZ
TANIGAWA, M
KAJIWARA, T
MURAOKA, K
MASUDA, M
OKADA, T
MAEDA, M
SUZUKI, A
MATSUDA, A
机构：
[1] ELECTROTECH LAB,TSUKUBA 305,JAPAN
[2] KYUSHU UNIV,FAC ENGN,DEPT ELECT ENGN,FUKUOKA 812,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 9A期
关键词：
SILANE PLASMA; LASER-INDUCED DISSOCIATION; HYDROGEN ATOM; DENSITY DISTRIBUTION; 2-PHOTON EXCITATION; LYMAN BETA TRANSITION; AMORPHOUS SILICON;
D O I：
10.1143/JJAP.31.2917
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
During measurements of atomic hydrogen in a silane plasma using two-photon-excited laser-induced fluorescence, laser-induced dissociation of the gas was observed. This was investigated until conditions for the input laser fluence were determined where the effect was negligible. A measurement of the atomic hydrogen distribution was then performed within the limits of these conditions.
引用
收藏
页码：2917 / 2918
页数：2
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