Effect of laser-induced dissociation during measurements of hydrogen atoms in silane plasmas using two-photon-excited laser-induced fluorescence

被引：0
|
作者：
机构：
[1] Park, Won Zoo
[2] Tanigawa, Manabu
[3] Kajiwara, Toshinori
[4] Muraoka, Katsunori
[5] Masuda, Mitsuharu
[6] Okada, Tatsuo
[7] Maeda, Mitsuo
[8] Suzuki, Atsushi
[9] Matsuda, Akihisa
来源：
Park, Won Zoo | 1600年 / 31期
关键词：
Hydrogen atom density distribution - Laser induced dissociation - Lyman beta transition - Silane plasmas - Two photon excitation;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
During measurements of atomic hydrogen in a silane plasma using two-photon-excited laser-induced fluorescence, laser-induced dissociation of the gas was observed. This was investigated until conditions for the input laser fluence were determined where the effect was negligible. A measurement of the atomic hydrogen distribution was then performed within the limits of these conditions.
引用
收藏
相关论文
共 50 条
  • [11] 2-PHOTON ABSORPTION LASER-INDUCED FLUORESCENCE OF H-ATOMS - A PROBE FOR HETEROGENEOUS PROCESSES IN HYDROGEN PLASMAS
    TSEREPI, AD
    MILLER, TA
    JOURNAL OF APPLIED PHYSICS, 1994, 75 (11) : 7231 - 7236
  • [12] A guide to laser-induced fluorescence diagnostics in plasmas
    Freegarde, TGM
    Hancock, G
    JOURNAL DE PHYSIQUE IV, 1997, 7 (C4): : 15 - 29
  • [13] Detection of hydrogen atoms in SiH4-H2 radio-frequency plasmas using two-photon laser-induced fluorescence
    Hertl, M
    Jolly, J
    Baravian, G
    JOURNAL OF APPLIED PHYSICS, 2002, 92 (02) : 710 - 715
  • [14] Laser-induced fluorescence from collisionally excited Si atoms in laser ablation plume
    Okano, A
    Takayanagi, K
    JOURNAL OF APPLIED PHYSICS, 1999, 86 (07) : 3964 - 3972
  • [15] APPLICATION OF 2-PHOTON-EXCITED LASER-INDUCED FLUORESCENCE TO ATOMIC-HYDROGEN MEASUREMENTS IN THE EDGE REGION OF HIGH-TEMPERATURE PLASMAS
    KAJIWARA, T
    SHINKAWA, T
    UCHINO, K
    MASUDA, M
    MURAOKA, K
    OKADA, T
    MAEDA, M
    SUDO, S
    OBIKI, T
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1991, 62 (10): : 2345 - 2349
  • [16] Two-photon laser-induced fluorescence spectrum of NO#
    Zhang, LS
    Zhang, GY
    Yang, XD
    Li, Y
    Zhao, XH
    HIGH-POWER LASERS AND APPLICATIONS II, 2002, 4914 : 318 - 321
  • [17] LASER-INDUCED FLUORESCENCE OF NAK AND THE DISSOCIATED ATOMS
    KATO, H
    NODA, C
    JOURNAL OF CHEMICAL PHYSICS, 1980, 73 (10): : 4940 - 4945
  • [18] MULTI-PHOTON LASER-INDUCED FLUORESCENCE
    RODGERS, MO
    DAVIS, DD
    ASAI, K
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1979, 69 (10) : 1407 - 1407
  • [19] THE FLIGHT-OUT-OF-VIEW EFFECT IN RADIATIVE LIFETIME MEASUREMENTS OF EXCITED ATOMS BY THE METHOD OF LASER-INDUCED FLUORESCENCE
    MENG, B
    JOURNAL OF QUANTITATIVE SPECTROSCOPY & RADIATIVE TRANSFER, 1989, 41 (04): : 303 - 305
  • [20] Instantaneous thermometry imaging using two-photon laser-induced fluorescence
    Stiti, Mehdi
    Kornienko, Vassily
    Kristensson, Elias
    Castanet, Guillaume
    Berrocal, Edouard
    OPTICS LETTERS, 2024, 49 (10) : 2569 - 2572
12345