ETCHING OF PHOSPHORUS DOPED POLYSILICON FILMS.

被引：0
|
作者：
Chambers, Andrew A. [1 ]
Davies, Simon V. [1 ]
Lovett, Mostyn [1 ]
机构：
[1] Electrotech, Bristol, Engl, Electrotech, Bristol, Engl
来源：
Semiconductor International | 1988年 / 11卷 / 01期
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摘要：
4
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页码：66 / 69
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