Study of the Growth Kinetics, the Solubility and the Polytypism of Phosphorus-doped Silicon Carbide Epitaxial Films.

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作者：
Mokhov, E.N.
Usmanova, M.M.
Yuldashev, G.V.
Makhmudov, B.S.
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来源：
Neorganiceskie materialy | 1981年 / 17卷 / 02期
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摘要：
SEMICONDUCTING SILICON COMPOUNDS
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页码：258 / 261
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