Study of the Growth Kinetics, the Solubility and the Polytypism of Phosphorus-doped Silicon Carbide Epitaxial Films.

被引：0
|
作者：
Mokhov, E.N.
Usmanova, M.M.
Yuldashev, G.V.
Makhmudov, B.S.
机构：
来源：
Neorganiceskie materialy | 1981年 / 17卷 / 02期
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
SEMICONDUCTING SILICON COMPOUNDS
引用
收藏
页码：258 / 261
相关论文
共 50 条
  • [41] A study on the adsorptions of SO2 on pristine and phosphorus-doped silicon carbide nanotubes as potential gas sensors
    Lin, Wang-qiang
    Li, Fang
    Chen, Guang-hui
    Xiao, Song-tao
    Wang, Ling-yu
    Wang, Qiang
    CERAMICS INTERNATIONAL, 2020, 46 (16) : 25171 - 25188
  • [42] Effect of phosphorus content on phosphorus-doped polycrystalline silicon thin films prepared by vacuum evaporation
    Luo X.
    Wang S.
    Wang Z.
    Yong F.
    Fu C.
    Wang, Zhou (wangzhou1961@163.com), 2016, Cailiao Daobaoshe/ Materials Review (30): : 53 - 55and84
  • [43] Microstructures and photo-electric characteristics of phosphorus-doped hydrogenated silicon films
    Chen, Yongsheng
    Wang, Shengzhao
    Yang, Shi-E
    Gao, Xiaoyong
    Lu, Jingxiao
    Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology, 2006, 26 (01): : 8 - 11
  • [44] SCANNING-TUNNELING-MICROSCOPY INVESTIGATION OF PHOSPHORUS-DOPED POLYCRYSTALLINE SILICON FILMS
    GONZO, L
    LUI, A
    BISERO, D
    MATERIALS LETTERS, 1993, 18 (1-2) : 50 - 56
  • [45] Hydrogenation of Phosphorus-Doped Polycrystalline Silicon Films for Passivating Contact Solar Cells
    Truong, Thien N.
    Yan, Di
    Samundsett, Christian
    Basnet, Rabin
    Tebyetekerwa, Mike
    Li, Li
    Krerner, Felipe
    Cuevas, Andres
    Macdonald, Daniel
    Nguyen, Hieu T.
    ACS APPLIED MATERIALS & INTERFACES, 2019, 11 (05) : 5554 - 5560
  • [46] Crystallization-induced stress in phosphorus-doped amorphous silicon thin films
    1600, American Inst of Physics, Woodbury, NY, USA (75):
  • [47] Structure characteristics of phosphorus-doped hydrogenated nano-crystalline silicon films
    Yu, Xiao-Mei
    Wang, Jin-Liang
    Jiang, Xing-Liu
    Wang, Tian-Min
    Beijing Hangkong Hangtian Daxue Xuebao/Journal of Beijing University of Aeronautics and Astronautics, 2002, 28 (05): : 547 - 549
  • [48] ELECTRICAL-PROPERTIES OF PHOSPHORUS-DOPED POLYCRYSTALLINE SILICON FILMS CONTAMINATED WITH OXYGEN
    ANGELUCCI, R
    SEVERI, M
    SOLMI, S
    BALDI, L
    THIN SOLID FILMS, 1983, 103 (03) : 275 - 281
  • [49] CONTACT RESISTANCE TO UNDOPED AND PHOSPHORUS-DOPED HYDROGENATED AMORPHOUS-SILICON FILMS
    KANICKI, J
    APPLIED PHYSICS LETTERS, 1988, 53 (20) : 1943 - 1945
  • [50] Epitaxial Growth of Cadmium Selenide Films on Silicon with a Silicon Carbide Buffer Layer
    Antipov, V. V.
    Kukushkin, S. A.
    Osipov, A. V.
    Rubets, V. P.
    PHYSICS OF THE SOLID STATE, 2018, 60 (03) : 504 - 509
12345