KNOWLEDGE-BASED PROCESS DIAGNOSIS SYSTEM FOR SEMICONDUCTOR MANUFACTURING.

被引：0
|
作者：
Kurihara, Kenzou [1 ]
Akashi, Kichizou [1 ]
Meguro, Satoshi [1 ]
机构：
[1] Hitachi Ltd, Hitachi Ltd
来源：
Hitachi Review | 1986年 / 35卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
INTEGRATED CIRCUITS, LSI
引用
收藏
页码：5 / 8
相关论文
共 50 条
  • [41] WATER PURIFICATION CRITERIA FOR SEMICONDUCTOR MANUFACTURING.
    Iscoff, Ron
    1600, (08):
  • [42] Knowledge-based multi-agent system for manufacturing problem solving process in production plants
    Camarillo, Alvaro
    Rios, Jose
    Althoff, Klaus-Dieter
    JOURNAL OF MANUFACTURING SYSTEMS, 2018, 47 : 115 - 127
  • [43] A KNOWLEDGE-BASED SYSTEM FOR INFORMATION MANAGEMENT IN AN AUTOMATED AND INTEGRATED MANUFACTURING SYSTEM
    WEBER, DM
    MOODIE, CL
    ROBOTICS AND COMPUTER-INTEGRATED MANUFACTURING, 1988, 4 (3-4) : 601 - 617
  • [44] Knowledge-based fuzzy system for diagnosis and control of an integrated biological wastewater treatment process
    Pires, OC
    Palma, C
    Costa, JC
    Moita, I
    Alves, MM
    Ferreira, EC
    WATER SCIENCE AND TECHNOLOGY, 2006, 53 (4-5) : 313 - 320
  • [45] KNOWLEDGE-BASED SYSTEM GUIDES MACHINE LAYOUT IN FLEXIBLE MANUFACTURING SYSTEM
    KUSIAK, A
    HERAGU, SS
    INDUSTRIAL ENGINEERING, 1988, 20 (11): : 48 - 53
  • [46] A multimedia supported knowledge-based system for teaching semiconductor physics
    Ahmed, N
    Khan, MM
    1ST ASIA-PACIFIC FORUM ON ENGINEERING AND TECHNOLOGY EDUCATION, FORUM PROCEEDINGS, 1997, : 147 - 151
  • [47] A knowledge-based system of high speed machining for the manufacturing of products
    Liu, Tien-I
    Khan, Waqqas H.
    Oh, Chong T.
    INTERNATIONAL JOURNAL OF KNOWLEDGE-BASED AND INTELLIGENT ENGINEERING SYSTEMS, 2010, 14 (04) : 185 - 199
  • [48] Overview of surfactant applications in semiconductor manufacturing.
    Hurd, T
    Solomentsev, Y
    Siddiqui, S
    Matz, P
    Riley, D
    Hall, L
    Misra, A
    Fisher, M
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2003, 226 : U398 - U399
  • [49] A Knowledge-Based Approach for Decision Support System in Additive Manufacturing
    Jarrar, Qussay
    Belkadi, Farouk
    Bernard, Alain
    ADVANCES IN PRODUCTION MANAGEMENT SYSTEMS: ARTIFICIAL INTELLIGENCE FOR SUSTAINABLE AND RESILIENT PRODUCTION SYSTEMS, PT V, 2021, 634 : 319 - 327
  • [50] PRODUCTION PLANNING KNOWLEDGE-BASED SYSTEM FOR PHARMACEUTICAL MANUFACTURING LINES
    ARTIBA, A
    TAHON, C
    EUROPEAN JOURNAL OF OPERATIONAL RESEARCH, 1992, 61 (1-2) : 18 - 29
12345