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- [35] ELECTRON-DISTRIBUTION FUNCTION IN A LOW-PRESSURE INDUCTIVELY-COUPLED PLASMA PHYSICAL REVIEW E, 1995, 52 (01): : 972 - 980
- [36] Inductively Coupled Plasma Simulation Based on Electron Energy Distribution Function and Process Pressure APPLIED SCIENCE AND CONVERGENCE TECHNOLOGY, 2020, 29 (06): : 157 - 161