共 50 条
- [21] Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma PLASMA SOURCES SCIENCE & TECHNOLOGY, 2002, 11 (04): : 525 - 543
- [22] Electron Density and Electron Temperature Control with a Magnetic Field and a Grid in Inductively Coupled Argon Plasma Plasma Chemistry and Plasma Processing, 2023, 43 : 381 - 400
- [25] Effect of electron energy distribution function on power deposition and plasma density in an inductively coupled discharge at very low pressures PLASMA SOURCES SCIENCE & TECHNOLOGY, 2003, 12 (03): : 302 - 312
- [29] Electron density measurement using a partially covered hairpin resonator in an inductively coupled plasma REVIEW OF SCIENTIFIC INSTRUMENTS, 2020, 91 (11):
- [30] Electron density measurements on an inductively coupled plasma with a one-port microwave interferometer PLASMA SOURCES SCIENCE & TECHNOLOGY, 2012, 21 (05):