Compositional dependence of the optical properties and the H local bonding in a-Si1-xGex:H(x<0.4) thin films

被引：0

作者：

Dimova-Malinovska, D. ^{[1
]}

Nedialkova, L. ^{[1
]}

Kudoyarova, V. ^{[1
]}

机构：

[1] Bulgarian Acad of Science, Sofia, Bulgaria

来源：

Solar Energy Materials and Solar Cells | 1993年 / 30卷 / 01期

关键词：

Amorphous materials - Hydrogenation - Optical properties - Sputter deposition - Thin films;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

A study on hydrogenated amorphous silicon-germanium alloys is presented. Amorphous thin films are prepared by RF magnetron cosputtering. The dependence of the optical properties and parameters and the local hydrogen bonding to the composition of a-Si1-xGex:H films (x<0.4) has been investigated. It is very important to take into account the variation of hydrogen concentration when the influence of Ge content on optical properties and parameters is considered.

引用

页码：27 / 35

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