Compositional dependence of the optical properties and the H local bonding in a-Si1-xGex:H(x<0.4) thin films

被引：0
|
作者：
Dimova-Malinovska, D. [1 ]
Nedialkova, L. [1 ]
Kudoyarova, V. [1 ]
机构：
[1] Bulgarian Acad of Science, Sofia, Bulgaria
来源：
Solar Energy Materials and Solar Cells | 1993年 / 30卷 / 01期
关键词：
Amorphous materials - Hydrogenation - Optical properties - Sputter deposition - Thin films;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A study on hydrogenated amorphous silicon-germanium alloys is presented. Amorphous thin films are prepared by RF magnetron cosputtering. The dependence of the optical properties and parameters and the local hydrogen bonding to the composition of a-Si1-xGex:H films (x<0.4) has been investigated. It is very important to take into account the variation of hydrogen concentration when the influence of Ge content on optical properties and parameters is considered.
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页码：27 / 35
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