Contrast mechanisms of secondary electron images in scanning electron and ion microscopy

被引：0
|
作者：
Sakai, Y. [1 ]
Yamada, T. [1 ]
Suzuki, T. [1 ]
Ichinokawa, T. [2 ]
机构：
[1] JEOL, 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
[2] Department of Applied Physics, Waseda University, 3-4-1 Ohkubo, Shinjuku-ku, Tokyo 169-0072, Japan
来源：
Applied Surface Science | 1999年 / 144卷
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页码：96 / 100
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