Growth and Characterization of Epitaxial InN Films on Sapphire Substrate Using an ArF Excimer Laser-Assisted Metalorganic Vapor-Phase Epitaxy (LA-MOVPE)

被引：0
|
作者：
Bhuiyan, Ashraful Ghani [1 ]
Tanaka, Tatsuya [1 ]
Kasashima, Ken [1 ]
Hashimoto, Akihiro [1 ]
Yamamoto, Akio [1 ,2 ]
机构：
[1] Department of Electrical Engineering, Fukui University, 3-9-1 Bunkyo, Fukui 910-8507, Japan
[2] CREATE FUKUI JST, 61-10 Kawai-washizuka, Fukui 910-0102, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2003年 / 42卷 / 12期
关键词：
D O I：
10.1143/jjap.42.7284
中图分类号：
学科分类号：
摘要：
Metallic films
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收藏
页码：7284 / 7289
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