MONOLYTHIC SENSOR DEVICE FOR DETECTING MECHANICAL VIBRATION.

被引：0
|
作者：
Nakamura, Masashi [1 ]
Hoshino, Shigeo [1 ]
Muro, Hideo [1 ]
机构：
[1] Nissan Motor Co, Yokosuka, Jpn, Nissan Motor Co, Yokosuka, Jpn
来源：
Denshi Tokyo | 1985年 / 24期
关键词：
CANTILEVERS - IC CHIP - MECHANICAL VIBRATION - SEMICONDUCTOR VIBRATION SENSOR;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：87 / 88
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