MONOLYTHIC SENSOR DEVICE FOR DETECTING MECHANICAL VIBRATION.

被引：0

作者：

Nakamura, Masashi ^{[1
]}

Hoshino, Shigeo ^{[1
]}

Muro, Hideo ^{[1
]}

机构：

[1] Nissan Motor Co, Yokosuka, Jpn, Nissan Motor Co, Yokosuka, Jpn

来源：

Denshi Tokyo | 1985年 / 24期

关键词：

CANTILEVERS - IC CHIP - MECHANICAL VIBRATION - SEMICONDUCTOR VIBRATION SENSOR;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：87 / 88

共 50 条

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