Formation of Ta2O5 films by laser ablation from Ta target under oxygen atmosphere

被引：0
|
作者：
Yano, T. [1 ]
Ooie, T. [1 ]
Yoneda, M. [1 ]
Katsumura, M. [1 ]
Hino, T. [1 ]
Araki, T. [1 ]
机构：
[1] Shikoku Natl Industrial Research, Inst, Takamatsu, Japan
来源：
Nippon Kinzoku Gakkaishi/Journal of the Japan Institute of Metals | 1997年 / 61卷 / 01期
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摘要：
16
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页码：71 / 76
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