Dependence of room-temperature oxidation of silicon catalyzed by Cu3Si on the silicide grain size

被引：0
|
作者：
Liu, G.S.
Chen, L.J.
机构：
来源：
Journal of Applied Physics | 1994年 / 75卷 / 05期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] Room-temperature atmospheric oxidation of Si nanocrystals after HF etching
    Pi, X. D.
    Mangolini, L.
    Campbell, S. A.
    Kortshagen, U.
    PHYSICAL REVIEW B, 2007, 75 (08)
  • [42] EFFECT OF ORGANIC CONTAMINANTS ON THE OXIDATION-KINETICS OF SILICON AT ROOM-TEMPERATURE
    LICCIARDELLO, A
    PUGLISI, O
    PIGNATARO, S
    APPLIED PHYSICS LETTERS, 1986, 48 (01) : 41 - 43
  • [43] TEMPERATURE-DEPENDENCE OF THE ODMR SIGNALS IN A-SI - H - ROOM-TEMPERATURE ODMR
    DEPINNA, SP
    CAVENETT, BC
    SEARLE, TM
    AUSTIN, IG
    SOLID STATE COMMUNICATIONS, 1982, 43 (02) : 79 - 84
  • [44] ROOM-TEMPERATURE ANODIC PLASMA OXIDATION OF TANTALUM SILICIDE - OXIDE COMPOSITION AND ELECTRICAL-PROPERTIES
    CLIMENT, A
    PERRIERE, J
    LAURENT, A
    LAVERNHE, B
    PEREZCASERO, R
    MARTINEZDUART, JM
    APPLIED SURFACE SCIENCE, 1989, 38 (1-4) : 125 - 132
  • [45] KINETICS OF THE ROOM-TEMPERATURE AIR OXIDATION OF HYDROGENATED AMORPHOUS SILICON AND CRYSTALLINE SILICON.
    Lu, Z.H.
    Sacher, E.
    Yelon, A.
    Philosophical Magazine B: Physics of Condensed Matter; Electronic, Optical and Magnetic Properties, 1988, 58 (04): : 385 - 388
  • [46] KINETICS OF THE ROOM-TEMPERATURE AIR OXIDATION OF HYDROGENATED AMORPHOUS-SILICON AND CRYSTALLINE SILICON
    LU, ZH
    SACHER, E
    YELON, A
    PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1988, 58 (04): : 385 - 388
  • [47] AN AUGER-ELECTRON SPECTROSCOPY STUDY OF THE SPUTTERING AND ROOM-TEMPERATURE OXIDATION OF TERBIUM AND TERBIUM SILICIDE
    BERNING, GLP
    SWART, HC
    DEWITT, B
    APPLIED SURFACE SCIENCE, 1993, 64 (01) : 1 - 7
  • [48] EFFECT OF SILICON SURFACE-CLEANING PROCEDURES ON THE GROWTH OF CU3SI ON SI(100)-ORIENTED WAFERS
    VIALE, D
    WEBER, G
    GILLOT, B
    OXIDATION OF METALS, 1991, 35 (5-6): : 415 - 426
  • [49] STRENGTH-GRAIN SIZE BEHAVIOR OF ZRO2 AT ROOM-TEMPERATURE
    RICE, RW
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1994, 13 (19) : 1408 - 1412
  • [50] Kinetics and energetics of room-temperature microstructure in nanocrystalline Cu films: The grain-size dependent intragrain strain energy
    Chai, Ze
    Huang, Xiaokang
    Xu, Jijin
    Yu, Zhiyuan
    Ji, Vincent
    Jiang, Chuanhai
    Chen, Xiaoqi
    JOURNAL OF APPLIED PHYSICS, 2022, 131 (05)
12345