Diffusion of gold during the gettering influence of phosphorus

被引：0
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作者：
Zimmermann, Horst [1 ]
机构：
[1] Fraunhofer-Arbeitsgruppe fuer, Integrierte Schaltungen, Erlangen, Germany
来源：
Materials Science Forum | 1994年 / 143-4卷 / pt 3期
关键词：
Diffusion in solids;
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摘要：
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页码：1647 / 1652
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