Effect of argon addition on the microstructure, texture and phases of silicon carbide prepared by chemical vapor deposition

被引：0
|
作者：
Lu, Yang-Ming [1 ]
Hon, Min-Hsiung [1 ]
机构：
[1] Natl Cheng Kung Univ, Tainan, Taiwan
来源：
Journal of the Ceramic Society of Japan. International ed. | 1991年 / 99卷 / 12期
关键词：
Argon effects - Crystal surface - Isotropic pyrolytic graphite - Methyltrichlorosilane - Silicon single crystal - X ray diffractometry;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1136 / 1139
相关论文
共 50 条
  • [41] THERMODYNAMIC CALCULATIONS FOR THE CHEMICAL VAPOR DEPOSITION OF SILICON CARBIDE.
    Kingon, Angus I.
    Lutz, Leonard J.
    Davis, Robert F.
    Liaw, P.
    1600, (66):
  • [42] GROWTH OF SILICON-CARBIDE BY CHEMICAL VAPOR-DEPOSITION
    CHOI, BJ
    KIM, DR
    JOURNAL OF MATERIALS SCIENCE LETTERS, 1991, 10 (14) : 860 - 862
  • [43] A MODEL OF SILICON-CARBIDE CHEMICAL VAPOR-DEPOSITION
    ALLENDORF, MD
    KEE, RJ
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1991, 138 (03) : 841 - 852
  • [44] Conformal and superconformal chemical vapor deposition of silicon carbide coatings
    Huang, Jing-Jia
    Militzer, Christian
    Wijayawardhana, Charles
    Forsberg, Urban
    Pedersen, Henrik
    Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2022, 40 (05):
  • [45] Conformal and superconformal chemical vapor deposition of silicon carbide coatings
    Huang, Jing-Jia
    Militzer, Christian
    Wijayawardhana, Charles
    Forsberg, Urban
    Pedersen, Henrik
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2022, 40 (05):
  • [46] Kinetics of halide chemical vapor deposition of silicon carbide film
    Wang, Rong
    Ma, Ronghui
    JOURNAL OF CRYSTAL GROWTH, 2007, 308 (01) : 189 - 197
  • [47] Modeling of silicon carbide chemical vapor deposition in a vertical reactor
    Vorob'ev, AN
    Egorov, YE
    Makarov, YN
    Zhmakin, AI
    Galyukov, AO
    Rupp, R
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1999, 61-2 : 172 - 175
  • [48] Chemical vapor deposition method for the manufacture of silicon carbide tubes
    Zhao, Guo Ying
    Zhu, Ching Wen
    Revankar, Vithal
    Hlavacek, Vladimir
    1600, (184):
  • [49] METALLIC COATING OF SILICON CARBIDE FILAMENTS BY CHEMICAL VAPOR DEPOSITION
    VILLARD, M
    CLOUET, A
    MARCHAL, M
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1970, 117 (03) : C106 - &
  • [50] COMPARISON OF THE PYROLYSIS PRODUCTS OF DICHLORODIMETHYLSILANE IN THE CHEMICAL-VAPOR-DEPOSITION OF SILICON-CARBIDE ON SILICA IN HYDROGEN OR ARGON
    CAGLIOSTRO, DE
    RICCITIELLO, SR
    REN, J
    ZAGHI, F
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1994, 77 (10) : 2721 - 2726
12345