Effect of argon addition on the microstructure, texture and phases of silicon carbide prepared by chemical vapor deposition

被引：0
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作者：
Lu, Yang-Ming [1 ]
Hon, Min-Hsiung [1 ]
机构：
[1] Natl Cheng Kung Univ, Tainan, Taiwan
来源：
Journal of the Ceramic Society of Japan. International ed. | 1991年 / 99卷 / 12期
关键词：
Argon effects - Crystal surface - Isotropic pyrolytic graphite - Methyltrichlorosilane - Silicon single crystal - X ray diffractometry;
D O I：
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学科分类号：
摘要：
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页码：1136 / 1139
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