TUNGSTEN DISILICIDE FORMATION IN CODEPOSITED AMORPHOUS WSix ALLOY THIN FILMS.

被引：0
|
作者：
Nava, F. [1 ]
Weiss, B.Z. [1 ]
Ahn, K. [1 ]
Tu, K.N. [1 ]
机构：
[1] Univ di Modena, Modena, Italy, Univ di Modena, Modena, Italy
来源：
Vide, les Couches Minces | 1987年 / 42卷 / 236期
关键词：
RESISTIVITY MAXIMUM - SHEET RESISTIVITY - TUNGSTEN DISILICIDE;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：225 / 228
相关论文
共 50 条
  • [21] NOVEL TECHNIQUE FOR DEPOSITION OF HYDROGENATED AMORPHOUS SILICON THIN FILMS.
    Robertson, P.A.
    Milne, W.I.
    1600, (22):
  • [22] Chemical ano magnetic stability of amorphous CoSmCu thin films.
    Joshi, N
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2000, 219 : U408 - U408
  • [23] EFFECTS OF SM ON AMORPHOUS Gd-Fe THIN FILMS.
    Nagato, K.
    Satoh, T.
    Itoh, M.
    Asanuma, M.
    IEEE translation journal on magnetics in Japan, 1985, TJMJ-2 (04): : 355 - 356
  • [24] AMORPHOUS TO CRYSTALLINE TRANSITION IN Dy-Fe THIN FILMS.
    Khan, M.S.Rahman
    Applied Physics A: Solids and Surfaces, 1986, A40 (04): : 241 - 245
  • [25] FORMATION MECHANISM OF THE SPIRALS IN THE EXPLOSIVE CRYSTALLIZATION OF AMORPHOUS SILICON FILMS.
    Chen Zhiming
    Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 1986, 7 (01): : 102 - 105
  • [26] THE USE OF FREE-ENERGY VS COMPOSITION CURVES IN THE PREDICTION OF PHASE FORMATION IN CODEPOSITED ALLOY THIN-FILMS
    SAUNDERS, N
    MIODOWNIK, AP
    CALPHAD-COMPUTER COUPLING OF PHASE DIAGRAMS AND THERMOCHEMISTRY, 1985, 9 (03): : 283 - 290
  • [27] Electroplating of amorphous thin films of tungsten/nickel alloys
    Younes, O
    Zhu, L
    Rosenberg, Y
    Shacham-Diamand, Y
    Gileadi, E
    LANGMUIR, 2001, 17 (26) : 8270 - 8275
  • [28] Crystallization kinetics of amorphous aluminum–tungsten thin films
    T. Car
    N. Radić
    J. Ivkov
    E. Babić
    A. Tonejc
    Applied Physics A, 1999, 68 : 69 - 73
  • [29] Synthesis of single source precursors for the CVD of tungsten oxide thin films.
    Parkin, IP
    Cross, WB
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2001, 222 : U599 - U599
  • [30] SYNTHESIS AND CHARACTERIZATION OF AMORPHOUS Si-Zn-S ALLOY FILMS.
    Morimoto, Akiharu
    Shimizu, Tatsuo
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, 1986, 25 (09): : 1275 - 1279
12345