Submicron electron-beam tester for VLSI circuits beyond the 4-Mb DRAM

被引：0
|
作者：
机构：
[1] Fox, F.
[2] Koelzer, J.
[3] Otto, J.
[4] Plies, E.
来源：
Fox, F. | 1600年 / 34期
关键词：
Integrated circuits; VLSI;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：2 / 3
相关论文
共 50 条
  • [21] ELECTRON-BEAM PROBER FOR VLSI DIAGNOSIS
    FURUKAWA, Y
    GOTO, Y
    ITO, A
    ISHIZUKA, T
    OZAKI, K
    INAGAKI, T
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (03): : 874 - 878
  • [22] A 12-MHZ DATA CYCLE 4-MB DRAM WITH PIPELINE OPERATION
    KUSHIYAMA, N
    WATANABE, Y
    OHSAWA, T
    MURAOKA, K
    NAGAHAMA, Y
    FURUYAMA, T
    IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1991, 26 (04) : 479 - 483
  • [23] ELECTRON-BEAM TECHNOLOGY FOR VLSI.
    Takigawa, Tadahiro
    Matsumoto, Yushi
    1600, OHMSHA Ltd, Tokyo, Jpn (13):
  • [24] AUTOMATIC-MEASUREMENT WITH AN ELECTRON-BEAM TESTER
    ANBE, T
    OKUBO, K
    TEGURI, H
    ITO, A
    MICROELECTRONIC ENGINEERING, 1993, 21 (1-4) : 355 - 358
  • [25] A 38-NS 4-MB DRAM WITH A BATTERY-BACKUP (BBU) MODE
    KONISHI, Y
    DOSAKA, K
    KOMATSU, T
    INOUE, Y
    KUMANOYA, M
    TOBITA, Y
    GENJYO, H
    NAGATOMO, M
    YOSHIHARA, T
    IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1990, 25 (05) : 1112 - 1117
  • [26] SCANNING ELECTRON-BEAM PROBES VLSI CHIPS
    FAZEKAS, P
    FEUERBAUM, HP
    WOLFGANG, E
    ELECTRONICS, 1981, 54 (14): : 105 - 112
  • [27] ELECTRON-BEAM TESTS DENSE VLSI CHIPS
    SMITH, K
    ELECTRONICS, 1984, 57 (08): : 86 - &
  • [28] ELECTRON BEAM TESTER A TOOL FOR VLSI COMPONENTS ANALYSIS.
    Bourgeon, Gerard
    Microelectronic Engineering, 1987, 7 (2-4) : 327 - 332
  • [29] A 100-MHZ 4-MB CACHE DRAM WITH FAST COPY-BACK SCHEME
    DOSAKA, K
    KONISHI, Y
    HAYANO, K
    HIMUKASHI, K
    YAMAZAKI, A
    IWAMOTO, H
    KUMANOYA, M
    HAMANO, H
    YOSHIHARA, T
    IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1992, 27 (11) : 1534 - 1539
  • [30] A 14-NS 4-MB CMOS DRAM WITH 300-MW ACTIVE POWER
    KIRIHATA, T
    DHONG, SH
    KITAMURA, K
    SUNAGA, T
    KATAYAMA, Y
    SCHEUERLEIN, RE
    SATOH, A
    SAKAUE, Y
    TOBIMATSU, K
    HOSOKAWA, K
    SAITOH, T
    YOSHIKAWA, T
    HASHIMOTO, H
    KAZUSAWA, M
    IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1992, 27 (09) : 1222 - 1228
12345