Multichannel transmission ellipsometer for characterization of anisotropic optical materials

被引:0
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作者
Yarussi, R.A. [1 ]
Heyd, A.R [1 ]
Nguyen, H.V. [1 ]
Collins, R.W. [1 ]
机构
[1] The Pennsylvania State Univ, University Park, United States
关键词
Ellipsometry;
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页码:2320 / 2330
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