Formation of aluminium nitride and segregation of Cu impurity atoms in aluminium implanted by high dose nitrogen ions

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作者：
Lin, C.
Hemment, P.L.F.
Li, J.
Zou, S.
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Nuclear Instruments & Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1994年 / 84卷 / 02期
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10.1016/0168-583X(94)95756-8
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