Observation of recording marks in phase-change media using scanning electron microscopy channelling contrast image

被引：0

作者：

Luoh, Tuung ^{[1
]}

Bow, Jong-Shing ^{[1
]}

Peng, Alex ^{[1
]}

Tsai, Song-Yeu ^{[1
]}

Tseng, Mei-Rurng ^{[1
]}

机构：

[1] Materials Research Lab Industrial, Technology Research Inst, Taiwan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 3 B期

关键词：

Experimental; (EXP);

D O I：

暂无

中图分类号：

学科分类号：

摘要：

A technique for observing recording marks by SEM (scanning electron microscopy) channelling contrast imaging was proposed. In phase-change materials, the amorphous phases show less topographic change after the phase-change process, and we hard to be examined by SEM SEI (secondary electron image mode) imaging. Although these recording marks can be observed clearly by TEM (transmission electron microscopy), the TEM specimen preparation method is complicated. The SEM channelling contrast imaging technique provides an easier way to investigate the `distortion' of direct-overwrite amorphous marks in phase-change media.

引用

页码：1698 / 1700

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