Effect of showerhead hole structure on flow-field in large sized chemical vapor deposition reactor

被引：0

作者：

Wang, Chuncai ^{[1
]}

Cheng, Jia ^{[1
]}

Lu, Yijia ^{[1
]}

Ji, Linhong ^{[1
]}

机构：

[1] The Sate Key Laboratory Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, China

来源：

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2015年 / 35卷 / 12期

关键词：

D O I：

10.13922/j.cnki.cjovst.2015.12.18

中图分类号：

学科分类号：

摘要：

引用

页码：1500 / 1506

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