Effect of showerhead hole structure on flow-field in large sized chemical vapor deposition reactor

被引：0
|
作者：
Wang, Chuncai [1 ]
Cheng, Jia [1 ]
Lu, Yijia [1 ]
Ji, Linhong [1 ]
机构：
[1] The Sate Key Laboratory Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2015年 / 35卷 / 12期
关键词：
D O I：
10.13922/j.cnki.cjovst.2015.12.18
中图分类号：
学科分类号：
摘要：
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页码：1500 / 1506
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