ECS Transactions: Preface

被引：0

作者：

Obeng, Yaw

De Gendt, Stefan

Srinivasan, Purushothaman

Karim, Zia

Misra, Durga

Iwai, Hiroshi

Hess, Dennis

Grebel, Haim

机构：

[1] IBM T. J. Watson Research Center, Yorktown Heights, NY, United States

[2] NXP Semiconductors, University of Technology, Eindhoven, Netherlands

[3] Institute of Microelectronics, Singapore, Singapore

[4] Tokyo Institute of Technology, Yokohama, Japan

[5] QUALCOMM MEMS Technologies, San Jose, CA, United States

[6] Mattson Technology Inc., Fremont, CA, United States

来源：

ECS Transactions | 2009年 / 19卷 / 05期

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摘要：

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