ECS Transactions: Preface

被引：0
|
作者：
Obeng, Yaw
De Gendt, Stefan
Srinivasan, Purushothaman
Karim, Zia
Misra, Durga
Iwai, Hiroshi
Hess, Dennis
Grebel, Haim
机构：
[1] IBM T. J. Watson Research Center, Yorktown Heights, NY, United States
[2] NXP Semiconductors, University of Technology, Eindhoven, Netherlands
[3] Institute of Microelectronics, Singapore, Singapore
[4] Tokyo Institute of Technology, Yokohama, Japan
[5] QUALCOMM MEMS Technologies, San Jose, CA, United States
[6] Mattson Technology Inc., Fremont, CA, United States
来源：
ECS Transactions | 2009年 / 19卷 / 05期
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