Laser autocollimation measurement of small angle based on cross correlation

被引：0
|
作者：
Huang, Yin-Guo [1 ]
Lin, Yu-Chi [1 ]
Wang, Wei [1 ]
Zhao, Mei-Rong [1 ]
机构：
[1] State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China
来源：
Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering | 2010年 / 8卷 / 02期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：120 / 125
相关论文
共 50 条
  • [11] Profile measurement of silicon wafer by laser autocollimation
    Gao, W
    Yamada, T
    Kiyono, S
    Huang, PS
    ISMTII'2001: PROCEEDINGS OF THE FIFTH INTERNATIONAL SYMPOSIUM ON MEASUREMENT TECHNOLOGY AND INTELLIGENT INSTRUMENTS, 2001, : 125 - 129
  • [12] Investigation vignetting beams in optoelectronic autocollimation angle measurement system
    Konyakhin, Igor A.
    Sakhariyanova, Aiganym M.
    Smekhov, Andrey
    MODELING ASPECTS IN OPTICAL METROLOGY V, 2015, 9526
  • [13] High-Precision Small-Angle Measurement of Laser-Fiber Autocollimation Using Common-Path Polarized Light Difference
    Zheng, Fajia
    Long, Fei
    Zhao, Yuqiong
    Yu, Chunyu
    Jia, Peizhi
    Zhang, Bin
    Yuan, Ding
    Feng, Qibo
    IEEE SENSORS JOURNAL, 2023, 23 (09) : 9237 - 9245
  • [14] Laser autocollimation based on an optical frequency comb for absolute angular position measurement
    Chen, Yuan-Liu
    Shimizu, Yuki
    Tamada, Jun
    Nakamura, Kazuki
    Matsukuma, Hiraku
    Chen, Xiuguo
    Gao, Wei
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2018, 54 : 284 - 293
  • [15] AN AUTOCOLLIMATION MEASUREMENT OF RIGHT ANGLE ERROR WITH HELP OF POLARIZED LIGHT
    RATAJCZYK, F
    BODNAR, Z
    APPLIED OPTICS, 1966, 5 (05) : 755 - +
  • [16] Differential laser autocollimation probe for on-machine-measurement
    Kivono, S.
    Asakawa, Y.
    Kamada, O.
    Kume, T.
    Proceedings of the International Precision Engineering Seminar, 1991,
  • [17] High-precision autocollimation method based on a multiscale convolution neural network for angle measurement
    Shi, Jian
    Li, Yuechao
    Tao, Zixi
    Zhang, Daixi
    Xing, Heyang
    Tan, Jiubin
    OPTICS EXPRESS, 2022, 30 (16) : 29821 - 29832
  • [18] A DIFFERENTIAL LASER AUTOCOLLIMATION PROBE FOR ON-MACHINE MEASUREMENT
    KIYONO, S
    ASAKAWA, Y
    INAMOTO, M
    KAMADA, O
    PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1993, 15 (02): : 68 - 76
  • [19] Three-degree-of-freedom autocollimation angle measurement method based on crosshair displacement and rotation
    Guo, Yan
    Cheng, Haobo
    Liu, Gang
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2023, 94 (01):
  • [20] PRECISION-MEASUREMENT OF SURFACE FORM BY LASER AUTOCOLLIMATION
    ENNOS, AE
    VIRDEE, MS
    PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1983, 398 : 252 - 257
12345