Thick diamond-like carbon film deposited using mid-frequency magnetron sputtering

被引：0
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作者：
Yu, Xiang [1 ]
Liu, Yang [2 ]
Wang, Chengbiao [1 ]
Yu, Deyang [2 ]
机构：
[1] School of Engineering and Technology, China University of Geosciences, Beijing 100083, China
[2] Beijing Powertech Co. Ltd., Beijing 100072, China
来源：
Run Hua Yu Mi Feng/Lubrication Engineering | 2006年 / 10期
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页码：25 / 28
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